本規(guī)范共分10章和1個附錄。主要內容有:總則、術語、工藝設計、廠址選擇及布局、建筑與結構、給排水與消防、電氣、凈化空調及工藝排風、純水與廢水處理、氣體與真空等。

GB51122-2015······1

1 總則······11

2 術語······12

3 工藝設計······14

3.1 一般規(guī)定······14

3.2 技術設備······14

3.3 工藝布局······15

4 廠址選擇及布局······16

4.1 廠址選擇······16

4.2 總平面布局······16

5 建筑與結構······17

5.1 建筑······17

5.2 結構······17

5.3 防火與疏散······18

6 給排水與消防······19

6.1 給排水······19

6.2 工藝循環(huán)冷卻水系統(tǒng)······19

6.3 消防給水和滅火設備······20

7 電氣······22

7.1 供配電······22

7.2 照明······22

7.3 接地······22

7.4 防靜電······23

7.5 通信與安全保護······23

8 凈化空調及工藝排風······25

8.1 凈化空調······25

8.2 冷熱源······26

8.3 工藝排風······27

9 純水與廢水處理······28

9.1 純水······28

9.2 廢水處理······29

10 氣體與真空······30

10.1 大宗氣體······30

10.2 干燥壓縮空氣······31

10.3 真空······31

附錄A 集成電路封裝測試廠工藝流程······33

本規(guī)范用詞說明······34

引用標準名錄······35

附:條文說明······37